Reflectivity
CHARACTERISATION OF THIN FILM AND MULTILAYERS BY X-RAY REFLECTIVITY
Submitted by Rajshekhar Bar Supervisor: Dr. Sanjeev Kumar Srivastava
In partial fulfilment of the M.Sc.(2yr) degree in Physics
Department of Physics and Meteorology Indian Institute of Technology Kharagpur,721302,India May,2012
ACKNOWLEDGEMENT
First and foremost, I thank my advisor Prof. Sanjeev kumar Srivastava for the many useful suggestions and pieces of advice that he has given me. I am also thankful to all faculties of Department of physics and Meteorology for creating a comforting study environment for all its students. I would like to thank to Mr. Uttam Das and Mr.Rakesh Das who helped me in the laboratory for making films. I would also like to thank to all my friends who helped for the understanding of many things and for many fruitful discussions. Finally, all errors and limitations remaining in this report are mine alone.
Date: 02/05/2012
Rajshekhar Bar 10PH40026 Department of Physics and Meterology IIT Kharagpur
ABSTRACT
Now a days x-ray reflectivity is a very useful method for the study of thin films and multilayer. This method is based on total external reflectivity. Using this method we can calculate the thickness of the film electron density profile of the material and roughness of the film surface. After a short introduction of Fresnel’s reflectivity, the Parratt formulation is used for the calculation reflectivity for a stratified film. Then after discussing the experimental technique, we have calculated the thickness, electron density and roughness from the experimental curve.
CONTENTS
Introduction---------------------------------------------------------------[1] 2) Film deposition-----------------------------------------------------------[2] 3) Basic principle of x-ray reflectivity-------------------------------------[3] 4) Reflection and refraction at the boundary----------------------------[5] 5) X-ray reflectivity
Submitted by Rajshekhar Bar Supervisor: Dr. Sanjeev Kumar Srivastava
In partial fulfilment of the M.Sc.(2yr) degree in Physics
Department of Physics and Meteorology Indian Institute of Technology Kharagpur,721302,India May,2012
ACKNOWLEDGEMENT
First and foremost, I thank my advisor Prof. Sanjeev kumar Srivastava for the many useful suggestions and pieces of advice that he has given me. I am also thankful to all faculties of Department of physics and Meteorology for creating a comforting study environment for all its students. I would like to thank to Mr. Uttam Das and Mr.Rakesh Das who helped me in the laboratory for making films. I would also like to thank to all my friends who helped for the understanding of many things and for many fruitful discussions. Finally, all errors and limitations remaining in this report are mine alone.
Date: 02/05/2012
Rajshekhar Bar 10PH40026 Department of Physics and Meterology IIT Kharagpur
ABSTRACT
Now a days x-ray reflectivity is a very useful method for the study of thin films and multilayer. This method is based on total external reflectivity. Using this method we can calculate the thickness of the film electron density profile of the material and roughness of the film surface. After a short introduction of Fresnel’s reflectivity, the Parratt formulation is used for the calculation reflectivity for a stratified film. Then after discussing the experimental technique, we have calculated the thickness, electron density and roughness from the experimental curve.
CONTENTS
Introduction---------------------------------------------------------------[1] 2) Film deposition-----------------------------------------------------------[2] 3) Basic principle of x-ray reflectivity-------------------------------------[3] 4) Reflection and refraction at the boundary----------------------------[5] 5) X-ray reflectivity
References: 1. X-ray and Neutron Reflectivity analysis of thin flims and superlattices. H. Zabel , Appl Phys.A 58.159-168(1994) 2. Method of X-Ray and Neutron scattering in Polymer sciences. R.J.Roe 3. X –ray and Neutron reflectivity : Principles and applications. Alain Gibaud, Jean Daillant. 4.Materials science of thin film. Milton Ohring,2nd edition. (15)